Polysilicon films and interfaces
Symposium on polysilicon films and intefaces ( Boston, 1987)
Polysilicon films and interfaces ed. by C. Y. Wong, C. V. Thompson, K. N. Tu - Pittsburgh MRS 1988 - xi, 369p. - Materials research society symposium proceedings V.106 .
093183774X
620.193 / N881
Polysilicon films and interfaces ed. by C. Y. Wong, C. V. Thompson, K. N. Tu - Pittsburgh MRS 1988 - xi, 369p. - Materials research society symposium proceedings V.106 .
093183774X
620.193 / N881
