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Design, fabrication and development of polymer microcantilever for flow rate measurement and thermal actuation

Viannie, Leema Rose

Design, fabrication and development of polymer microcantilever for flow rate measurement and thermal actuation by Leema Rose Viannie - Bengaluru IISc 2017 - 174 p. 29 cm. CD

Dept. of Instrumentation and Applied Physics, IISc. Includes bibliographical references

Subjects--Topical Terms:
Fabrication; Microcantilever; MEMS; Cantilever flow sensor; Piezoresistivity

Dewey Class. No.: 681.2 / VIA(THESES)

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