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Micro process engineering: fundamentals, devices, fabrication, and applications (Vol. 5)

Kockmann, N.

Micro process engineering: fundamentals, devices, fabrication, and applications (Vol. 5) edited by N. Kockmann - Weinheim, Germany Wiley VCH 2006 - xxii, 507p.

ISBN: 9783527312467

Dewey Class. No.: 670.42 / MIC

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