Towards a united framework for design of MEMS based VLSI systems

Jairam, Sukumar

Towards a united framework for design of MEMS based VLSI systems - Bangalore IISc 2016 - xiv, 139 p.

Includes CD IISc, Dept of ECE, PhD Thesis

MEMS based VLSI systems; VLSI Circuits; Modeling & Simulation; MEMS based hybrid systems

621.395011 / P16 (THESIS)

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