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Design fabrication and characterization of low voltage capacitive RF MEMS switches

Shekhar, Sudhanshu

Design fabrication and characterization of low voltage capacitive RF MEMS switches by Sudhanshu Shekhar - Bangalore IISc 2015 - xx, 199p.

Includes CD IISc, Dept of ECE, PhD Thesis

Subjects--Index Terms: RF MEMS Switches; Solid State Semiconductor Switches; Dielectric charges; RF MEMS- design, fabrication, characterization

Dewey Class. No.: 621.3815370153724 / P15 (THESIS)

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