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Investigation of micro structures, sensors, actuators, machines & robots Proceedings /ed. by W. Benecke, H.C. Petzold

Benecke, W.

Investigation of micro structures, sensors, actuators, machines & robots Proceedings /ed. by W. Benecke, H.C. Petzold - New Jersey IEEE 1992 - xv, 240p incl. bibl

ISBN: 0780304985

Subjects--Index Terms: Microelectronics; MEMS 1992; IEEE Robotics and automation society;

Dewey Class. No.: 621.381 / N921 "SER"

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