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Characterization of electrostatic MEMS actuators beyond pull-in

Subrahmanyam, Gorthi V.R.M.S.

Characterization of electrostatic MEMS actuators beyond pull-in by Gorthi V R M S Subrahmanyam - Bangalore IISc 2006 - ix, 64p - IISc, Dept of SERC, MSc, Engg Thesis .

Dewey Class. No.: 621.381 / P063 "THESIS"

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