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Advancing semiconductor manufacturing excellence. ASMC 2005. Proceedings

IEEE/SEMI Advanced manufacturing conference and workshop (2005 Munich)

Advancing semiconductor manufacturing excellence. ASMC 2005. Proceedings - Piscataway IEEE 2005 - viii, 282p. incl. bibl.

ISBN: 0780389964

Dewey Class. No.: 621.38152 / P05 "SER"

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