Micro electro mechanical systems Technical Digest
IEEE International conference on micro electro mechanical systems(15 2002 Las Vegas)
Micro electro mechanical systems Technical Digest - Piscataway IEEE 2002 - xliii, 737p. incl. bibl.
0780371852
621.381 / P02 "SER"
Micro electro mechanical systems Technical Digest - Piscataway IEEE 2002 - xliii, 737p. incl. bibl.
0780371852
621.381 / P02 "SER"