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Factory of the future. Proceedings

Factory of the future. Proceedings - California SEMI 1993 - vi, 253p incl. bibl. - ASMC 1993 .

ISBN: 0780313674

Subjects--Index Terms: AMC 1993; Semiconductors - Manufacturing; Semiconductor equipment and materials international; IEEE components, packaging and manufacturing Society

Dewey Class. No.: 621.38152 / N932 "SER"

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